Highly Sensitive Flexible Capacitive Pressure Sensor with ZnO NW interlayers

Conference paper

Ma, S., Kumaresan, Y., Oliver Ozioko and Dahiya, R. 2021. Highly Sensitive Flexible Capacitive Pressure Sensor with ZnO NW interlayers. 2021 IEEE International Conference on Flexible and Printable Sensors and Systems (FLEPS). IEEE. https://doi.org/10.1109/fleps51544.2021.9469704
AuthorsMa, S., Kumaresan, Y., Oliver Ozioko and Dahiya, R.
TypeConference paper
Abstract

Pressure or force sensors that can reliably detect a broad range of pressure with high sensitivity are prerequisite for applications such as human-machine interface, electronic skin in robotics, and health monitoring. This paper presents a novel approach to fabricate a highly sensitive capacitive pressure sensor by introducing a zinc oxide nanowire (ZnO NW) interlayers between the polydimethylsiloxane (PDMS)/electrodes interface in the conventional metal-insulator-metal architecture. The sensing performances of PDMS-based pressure sensors with and without ZnO NW interlayers were investigated. The ZnO NW interlayers reinforced the electrical connection from metal to PDMS to significantly enhance the device performance with ~50 times improvement in sensitivity (from 0.125 %kPa -1 to 5.6452 %kPa -1 at a low-pressure range (0-10 kPa)) with respect to conventional PDMS only dielectric-based capacitive sensors.

KeywordsFlexible pressure sensors; Capacitive sensors; ZnO NWs
Year2021
Conference2021 IEEE International Conference on Flexible and Printable Sensors and Systems (FLEPS)
PublisherIEEE
Digital Object Identifier (DOI)https://doi.org/10.1109/fleps51544.2021.9469704
Web address (URL)https://ieeexplore.ieee.org/document/9469704
Accepted author manuscript
License
All rights reserved
File Access Level
Open
ISBN978-1-7281-9173-7
Output statusPublished
Publication dates05 Jul 2021
Publication process dates
Deposited20 Jun 2024
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