Highly Sensitive Flexible Capacitive Pressure Sensor with ZnO NW interlayers
Conference paper
Authors | Ma, S., Kumaresan, Y., Oliver Ozioko and Dahiya, R. |
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Type | Conference paper |
Abstract | Pressure or force sensors that can reliably detect a broad range of pressure with high sensitivity are prerequisite for applications such as human-machine interface, electronic skin in robotics, and health monitoring. This paper presents a novel approach to fabricate a highly sensitive capacitive pressure sensor by introducing a zinc oxide nanowire (ZnO NW) interlayers between the polydimethylsiloxane (PDMS)/electrodes interface in the conventional metal-insulator-metal architecture. The sensing performances of PDMS-based pressure sensors with and without ZnO NW interlayers were investigated. The ZnO NW interlayers reinforced the electrical connection from metal to PDMS to significantly enhance the device performance with ~50 times improvement in sensitivity (from 0.125 %kPa -1 to 5.6452 %kPa -1 at a low-pressure range (0-10 kPa)) with respect to conventional PDMS only dielectric-based capacitive sensors. |
Keywords | Flexible pressure sensors; Capacitive sensors; ZnO NWs |
Year | 2021 |
Conference | 2021 IEEE International Conference on Flexible and Printable Sensors and Systems (FLEPS) |
Publisher | IEEE |
Digital Object Identifier (DOI) | https://doi.org/10.1109/fleps51544.2021.9469704 |
Web address (URL) | https://ieeexplore.ieee.org/document/9469704 |
Accepted author manuscript | License All rights reserved File Access Level Open |
ISBN | 978-1-7281-9173-7 |
Output status | Published |
Publication dates | 05 Jul 2021 |
Publication process dates | |
Deposited | 20 Jun 2024 |
https://repository.derby.ac.uk/item/q6z09/highly-sensitive-flexible-capacitive-pressure-sensor-with-zno-nw-interlayers
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Accepted author manuscript
Highly Sensitive Flexible Capacitive Pressure Sensor with ZnO NW interlayers.pdf | ||
License: All rights reserved | ||
File access level: Open |
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